Current Publication
Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup
Steffen Hesse1, Michael Katzschmann1, Alex S. Huaman1, Stephan Gorges1, Eberhard Manske2
euspen – Special Interest Group Meeting: Precision Motion Systems & Control, , ’s-Hertogenbosch, Netherlands
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award