Current Publication
Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)
Ingo Ortlepp1,2, Jaqueline Stauffenberg1, Anja Krötschl2, Denis Dontsov3, Jens-Peter Zöllner4, Steffen Hesse5, Christoph Reuter2, Steffen Strehle2, Thomas Fröhlich1, Ivo W. Rangelow6, Eberhard Manske1
Proc. SPIE 12054, Novel Patterning Technologies 2022, 120540A (25 May 2022), DOI: doi.org/10.1117/12.2615118
1Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Max-Planck-Ring 12, 98693 Ilmenau, Thuringia, Germany, 3SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, 4Technische Universität Ilmenau, Department of Electrical Engineering and Information Technology, Institute for Micro- and Nanoelectronics, Micro- and Nanoelectronic Systems Group, 98684 Ilmenau, P.O. Box 10 05 65, Germany, 5IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 6Technische Universität Ilmenau, Department of Mechanical Engineering, Institute of Process Measurement and Sensor Technology, Nanoscale Systems Group, 98684 Ilmenau, P.O. Box 10 05 65, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award