Current Publication
Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
Jaqueline Stauffenberg1.
Ingo Ortlepp1.
Johannes Belkner1.
Denis Dontsov2.
Enrico Langlotz2.
Steffen Hesse3.
Ivo Rangelow4.
Eberhard Manske1.
Applied Sciences. 2022; 12(15):7843. DOI: doi.org/10.3390/app12157843
1Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Germany.
2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
4nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award