Current Publication
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)
Jaqueline Stauffenberg1.
Johannes Belkner1.
Denis Dontsov2.
Ludwig Herzog3.
Steffen Hesse3.
Ivo W Rangelow1,4.
Ingo Ortlepp1.
Thomas Kissinger1.
Eberhard Manske1.
2024 Meas. Sci. Technol. 35 085011, DOI: doi.org/10.1088/1361-6501/ad4668
1Institute for Process Measurement and Sensor Technology, Department for Mechanical Engineering, Gustav-Kirchhoff-Straße 1, Ilmenau, Germany.
2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.
4nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award