Current Publication
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)
Jaqueline Stauffenberg1, Johannes Belkner1, Denis Dontsov2, Ludwig Herzog3, Steffen Hesse3, Ivo W Rangelow1,4, Ingo Ortlepp1, Thomas Kissinger1, Eberhard Manske1
in Meas. Sci. Technol., vol. 35, no. 8, pp. 085011, 2024, DOI: doi.org/10.1088/1361-6501/ad4668
1Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany, 2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, 3IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 4nano analytik GmbH, Ehrenbergstraße 3, 98693 Ilmenau, Thuringia, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award