Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage

Current Publication

Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage

Davi Anders Brasil¹. Michael Katzschmann¹. Steffen Hesse¹. Ludwig Herzog¹. Thomas Kissinger². Thomas Fröhlich².

International Scientific Symposium on World Interferometry Day 2026, 20. April 2026, Ilmenau, Germany

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

Related content

Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.