Current Publication
A virtual metrology frame test setup using fiber interferometric sensors
Davi Anders Brasil1.
Steffen Hesse1.
Ludwig Herzog1.
Thomas Fröhlich2.
Thomas Kissinger2.
22nd International Metrology Congress (CIM 2025), Lyon, France, March 11-14, 2025
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award