6D Magnetic Levitation Positioning System with Compact Integrated 6D Sensor

Current Publication

C. Rudolf¹. C. Mock¹. C. Walenda¹. R. Glöss¹. R. Liang¹. C. Schäffel². M. Katzschmann². H.-U. Mohr².

12th EUSPEN International Conference, 2012, in Proceedings P7.04 Vol II, ISBN 978-0-9566790-0-0

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. ²Physik instrumente Karlsruhe Germany.

Article

Project

Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.