Current Publication
Silicon-Ceramic Composite Substrate: A Promising RF Platform for Heterogeneous Integration
Michael Fischer1.
Sebastian Gropp1.
Johannes Stegner1.
Astrid Frank2.
Martin Hoffmann1.
Jens Mueller1.
in IEEE Microwave Magazine, vol. 20, no. 10, pp. 28-43, Oct. 2019. DOI: doi.org/10.1109/MMM.2019.2928675
1IMN MacroNano, Technische Universität Ilmenau, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
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Project
MUSIK
IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.
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