Current Publication
Enhancing RF Bulk Acoustic Wave Devices: Multiphysical Modeling and Performance
Vikrant Chauhan1.
Christian Huck2.
Astrid Frank3.
Wolfgang Akstaller1.
Robert Weigel1.
Amelie Hagelauer1.
in IEEE Microwave Magazine, vol. 20, no. 10, pp. 56-70, Oct. 2019. DOI: doi.org/10.1109/MMM.2019.2928677
1Institute for Electronics Engineering, University of Erlangen-Nuremberg, Germany.
2Institute of Physics, University of Augsburg, Germany.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
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MUSIK
IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.
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