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Project
MEMS2015
The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.
Project
MEMS-Vibro3D
Research infrastructure for the next MEMS generation: 3D vibrometer system and new broadband amplifier
Project
MEMS-T-Lab
In the MEMS-T-Lab, IMMS takes highly complex semi-automated measurements for complete MEMS wafers
Project
MEDIKIT
IMMS has developed a chip for mobile diagnostic systems for the early detection of diseases using time-resolved fluorescence measurements.
Project
MagSens
IMMS was involved in research on MEMS sensors that will detect the weakest magnetic fields in the future, for example in medical technology.
Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.