SPIE 2021

Date, Type of contribution, Location:

22 February 2021–26 February 2021,Talk,online

Event:

Advanced Lithography Digital Forum of The International Society for Optics and Photonics

Description:

Nanopositioning and -fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm. Jaqueline Stauffenberg¹, Christoph Reuter¹, Ingo Ortlepp¹, Mathias Holz², Denis Dontsov³,Christoph Schäffel⁴, Jens-Peter Zöllner¹, Ivo W. Rangelow¹, Steffen Strehle¹, and Eberhard Manske¹.

¹Technische Universität Ilmenau, ²nano analytik GmbH, ³SIOS Meßtechnik GmbH, ⁴IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH).

Related content

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision…

Press release, 18 June 2020

Ready for Take-off – Vertikalantrieb für die 3D-Nanofertigung vorgestellt

IMMS-Doktorand verteidigt Promotion im DFG-Graduiertenkolleg NanoFab

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

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