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SPIE 2021

Date, Type of contribution, Location:
Advanced Lithography Digital Forum of The International Society for Optics and Photonics


Nanopositioning and -fabrication using the Nano Fabrication Machine with a positioning range up to Ø 100 mm. Jaqueline Stauffenberg1, Christoph Reuter1, Ingo Ortlepp1, Mathias Holz2, Denis Dontsov3,Christoph Schäffel4, Jens-Peter Zöllner1, Ivo W. Rangelow1, Steffen Strehle1, and Eberhard Manske1.

1Technische Universität Ilmenau, 2nano analytik GmbH, 3SIOS Meßtechnik GmbH, 4IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH).

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Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at) (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.