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Date, Type of contribution, Location:

Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive


Alex S. Huaman (1), Stephan Gorges (1), Michael Katzschmann (1), Steffen Hesse (1), Thomas Fröhlich (2), Eberhard Manske (2)

(1) IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), 98693 Ilmenau, Germany

(2) Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, Germany

euspen’s 22nd International Conference & Exhibition


This work presents an approach to equip an existing planar nanoprecision drive system with specially designed lifting and actuating units (LAUs), which can lift several kilograms along a vertical stroke of 10 mm with nanometer precision. These modules contain a pneumatic actuator to counteract the weight force along the entire travel range without introducing significant heat into the measurement space. An additional parallel acting electromagnetic actuator provides the precision positioning forces.

The effectiveness of the presented control strategy is verified via real-time experimentation, where the overall control scheme allows RMS positioning errors below 0.3 nm which seem to be dominated by the measurement noise. Moreover, it renders very low heat dissipation of about 54 nW to carry 4 kg payload.

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Alex S. Huaman

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Service for R&D

Development of mechatronic systems

We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.

Research field

Magnetic 6D direct drives with nm precision

To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.

Lead application

nm measurement and structuring of objects

To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.



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