AHMT Symposium 2026
A Large-Travel Hybrid Metrology Platform Integrating Laser Focus Sensor and Atomic Force Microscopy
Davi Anders Brasil (1), Michael Katzschmann (1), Steffen Hesse (1), Ludwig Herzog (1), Thomas Fröhlich (2), and
Thomas Kissinger (2)
(1) IMMS; (2) Technische Universität Ilmenau
Abstract:
Modern micro- and nanoscale manufacturing requires traceable multi-scale metrology spanning macroscopic geometries and sub-micrometre features. Singlesensor systems are limited by trade-offs between resolution, speed, and measurement range. This work presents a hybrid platform integrating an optical microscope, laser focus sensor (LFS), and atomic force microscope (AFM) on a six-degrees-of-freedom (6-DOF) nanopositioning stage, enabling inspection within a ø 200 mm x 25 mm workspace. A multi-stage alignment protocol ensures lateral repeatability through optical-to-mechanical verification, coordinate transformation, and edge-feature cross-correlation. Experiments on a patterned ultra-low expansion (ULE) substrate demonstrate consistent centroid localisation between LFS and AFM, with standard deviations below 100 nm. Residual discrepancies, attributed to different sensing principles, remain stable over time. The system enables hierarchical inspection through optical guidance, large-area LFS scanning, and targeted AFM analysis, supporting future scalable in-line metrology for semiconductors, micro-optics, and microelectromechanical systems (MEMS) applications.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision…
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award
Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
Alex S. Huaman
Press release,
iENA-Silbermedaille für Beobachter der Atome
Neues Regelungskonzept zur sub-nanometergenauen Positionierung
Press release,
Ready for Take-off – Vertikalantrieb für die 3D-Nanofertigung vorgestellt
IMMS-Doktorand verteidigt Promotion im DFG-Graduiertenkolleg NanoFab
This might also be interesting for you
![[Translate to English:]](/fileadmin/_processed_/9/0/csm_20200731_IMG_2732_K4PNP-INPOS_SG_1920x1280_7c70c69f8a.jpg "[Translate to English:]")
Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Contact
Contact
Dipl.-Hdl. Dipl.-Des. Beate Hövelmans
Head of Corporate Communications
beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13
Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.