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Project MEMS-Vibro3D

Research infrastructure for the next MEMS generation: 3D vibrometer system and new broadband amplifier

Thanks to the ERDF funding, IMMS was able to expand its research infrastructure for the vibrometric investigation of MEMS.

A new 3D vibrometer system measures out-of-plane vibrations as well as in-plane ones and thus allows the characterisation of sensor classes such as multiaxial inertial sensors.

Due to its frequency band of 9 to 250 MHz at a power of 200 W, the broadband amplifier system enables the electrostatic excitation of, for example, pressure sensors of the current generation, which have smaller and thicker membranes and are therefore much stiffer compared to pressure sensors of previous generations.

Acronym / Name:

MEMS-Vibro3D / Installation of a MEMS 3D vibrometer measuring station



Research institutions and ultra-precision mechanical engineering|Verification of MEMS models| methods for quality assurance of MEMS

Research field:Integrated sensor systems


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    CiS Workshop 2023

    Workshop Simulation & Design 2023 at CiS Forschungsinstitut für Mikrosensorik



    Dr.-Ing. Ludwig Herzog

    Head of Mechatronics

    ludwig.herzog(at) (0) 3677 874 93 60

    Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.


    The MEMS-Vibro3D project has been jointly funded by the federal “Land” of Thüringen with the reference 2015 FGI 0010 and by the EU in the EFRE (regional development) context as a means of improving the instrumental infrastructure to research.

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