Thanks to the ERDF funding, IMMS was able to expand its research infrastructure for the vibrometric investigation of MEMS.

A new 3D vibrometer system measures out-of-plane vibrations as well as in-plane ones and thus allows the characterisation of sensor classes such as multiaxial inertial sensors.

Due to its frequency band of 9 to 250 MHz at a power of 200 W, the broadband amplifier system enables the electrostatic excitation of, for example, pressure sensors of the current generation, which have smaller and thicker membranes and are therefore much stiffer compared to pressure sensors of previous generations.