Lead application nm measurement and structuring of objects: To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Jun Tan, Muralikrishna Sathyamurthy, Alexander Rolapp, Jonathan Gamez, Moataz Elkharashi, Benjamin Saft, Sylvo Jäger, Ralf Sommer,
2020
IEEE Journal of Radio Frequency Identification
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
