Service for R&D: MEMS – simulation, design and test. As a design house for the open technology platform XMB-10 from X-FAB, we develop acceleration sensors according to your specification in a semi-automated design process.
E. Kallenbach,
P. Maißer
J. Lückel
E. Saffert
Ch. Schäffel
H. Freudenberg
W. Kuhlbusch
ASPE, Annual Meeting, Norfolk, Virginia, Proc. P 507-510, Oktober 1997