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Next generation test equipment for micro-production

K. Gastinger1. M. Kujawinska2. U. Zeitner3. C. Gorecki4. Dr. Ch. Schäffel5. S. Beer6. R. Moosburger7. M. Pizzi8.

Photonics Europe 2010, 12.04-16.04.2010, Brüssel, Belgien

1SINTEF IKT Optical measurement systems and data analysis, Trondheim, Norway. 2Warsaw Universtiy of Technology, IMiF, Warsaw, Poland. 3Fraunhofer IOF, Jena, Germany. 4CNRS FEMTO-ST, Besançon, France. 5IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 6CSEM SA, Zurich, Switzerland. 7Heliotis, Root Längenbold, Switzerland. 8Techfab s.r.l., Chivasso, Torino, Italy.
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