Annual Report 2021
ANNUAL REPORT 2021 2 Contents >>Integrated sensor systems 3 Foreword 101 Magnetic 6D direct drives with >>Distributed 5 Obituary Dr.-Ing. Christoph Schäffel nanometre precision measurement + 6 25 years of IMMS 102 Highlights of 2021 in our research test systems on Magnetic 6D direct drives with >>Mag6D nm 31 Voices from industry and nanometre precision direct drives academia on current projects 107 Investigations on tracking control of > Contents 39 Working hand in hand with the vertical motion systems for nano- *…
Annual Report 2012
A N N U A L R E P O RT 2012 Publishing Details Contents 4 6 8 Publisher Institut für Mikroelektronik- und MechatronikSysteme gemeinnützige GmbH* Ehrenbergstraße 27 D-98693 Ilmenau +49.3677.6955.00 Tel +49.3677.6955.15 Fax imms@imms.de http://www.imms.de Editing and Proof Reading Prof. Dr.-Ing. Ralf Sommer Dipl.-Ing. Hans-Joachim Kelm Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Translation Susan Kubitz, www.QualityTranslations.de 10 11 Design, Photographs and Illustrations Dipl.-Hdl. Dipl.-Des. Beate Hövelmans 12 16 17 21 Typography and Information Graphics Dipl.-Hdl.…
Steffen Hesse,
Michael Katzschmann
Alex S. Huaman
Stephan Gorges
Eberhard Manske
euspen – Special Interest Group Meeting: Precision Motion Systems & Control, 15th – 16th November 2022, s-Hertogenbosch, The Netherlands, NL
