Research field Magnetic 6D-direct drives with nanometre precision: To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application nm measurement and structuring of objects: To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Falk Eisenreich,
Marco Götze
Silvia Krug
Tino Hutschenreuther
Kathrin Veigel
in elektroniknet.de, 22. August 2024, https://www.elektroniknet.de/smarter-world/energieautarkes-system-behaelt-feinstaub-permanent-im-blick.219767.html