EUSPEN 2021

Date, Type of contribution, Location:

17 November 2021–18 November 2021,Talk,online

Event:

Special Interest Group Meeting: Micro/Nano Manufacturing

Further information:

More on the conference at www.euspen.eu

Description:

Interferometrically controlled, scalable x-y planar positioning stage concept. Ilko Rahneberg¹, Enrico Langlotz¹, Denis Dontsov¹, Steffen Hesse², Jaqueline Stauffenberg³, Eberhard Manske³

¹SIOS Meßtechnik GmbH, ²IMMS, ³Technische Universität Ilmenau

Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

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