2176 results
Reference
1602.
SMARTIEHS - The interferometric test station for parallel inspection of MEMS and MOEMS
Reference
1603.
Planar Magnetic Drives and Bearings for Multi-Axis Nanopositioning Machines with Large Travel Ranges.
Reference
1605.
Realisierung eines PDICs für 12fach Blu-ray-Disc-RW Laufwerke mit Hilfe neuartiger effizienter Entwurfsmethodiken
Reference
1606.
First results of an interferometric controlled planar positioning system for 100 mm with zerodur slider
Reference
1607.
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
Reference
1608.
First results of an interferometric controlled planar positioning system for 100 mm with zerodur slider