Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.
Organisation: Here you will find our organisation chart, information on the Institute’s management, our departments, our supervisory board and our scientific advisory board, as well as contact details.
S. Michael,
R. Paris
S. Hering
6. ITG/GI/GMM-Workshop Multi-Nature Systems: Entwicklung von Systemen mit elektronischen und nichtelektronischen Komponenten, Februar 2007, Erfurt