For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
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Jun Tan
Muralikrishna Sathyamurthy
Alexander Rolapp
Jonathan Gamez
Moataz Elkharashi
Benjamin Saft
Sylvo Jäger
Ralf Sommer
in IEEE Journal of Radio Frequency Identification, vol. 4, no. 1, pp. 3-13, March 2020, DOI: https://doi.org/10.1109/JRFID.2020.2967862
Lead application nm measurement and structuring of objects: To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Safwat Irteza,
Eric Schäfer
Christian Vollmer
Matteo Sgammini
Ralf Stephan
Eckhard Hennig
Matthias A. Hein
Wireless Information Technology and Systems (ICWITS), 2012 IEEE International Conference on, DOI: 10.1109/ICWITS.2012.6417676, IEEE Xplore Digital Library, http://ieeexplore.ieee.org/Xplore/, Page(s): 1-4
