1755 results
Reference
1002.
Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)
Reference
1003.
Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive
Reference
1004.
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)
Reference
1005.
Investigations on Wafer-Level Testing for Accelerometers by Harmonic Response Measurements
Reference
1006.
Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding