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Reference

1001. Interferometric controlled planar positioning system with zerodur slider

S. Hesse, C. Schäffel H-U. Mohr H.-J. Büchner Ilmenau. In Proceedings. 56. Int. wissenschaftliches Kolloquium der TU Ilmenau. URN: urn:nbn:de:gbv:ilm1-2011iwk-103:1

Reference

1002. Interferometric controlled planar positioning system with zerodur slider

S. Hesse, C. Schäffel H-U. Mohr H.-J. Büchner Ilmenau: 56. IWK der TU Ilmenau. 12.09. - 16.09.2011

Reference

1003. Interferometric Test Station for Parallel Inspection of MEMS

C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer. Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. 03.11.2011

Reference

1004. Interferometric Test Station for Parallel Inspection of MEMS

C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. http://141.30.123.140/feinwerkwiki/index.php/5._Tagung_Feinwerktechnische_Konstruktion

Reference

1005. Interferometrically controlled, scalable x-y planar positioning stage concept

Ilko Rahneberg, Enrico Langlotz Denis Dontsov Steffen Hesse Jaqueline Stauffenberg Eberhard Manske Special Interest Group Meeting: Micro/Nano Manufacturing, 17 – 18 November 2021, Virtual

Press release

1006. International conferences on methods for the design of integrated circuits

The SMACD & PRIME 2021 conferences planned for Erfurt are being held virtually from 19-22 July. Photo Krämerbrücke Erfurt: lapping @ Pixabay.

Young scientists from electrical engineering visit Erfurt virtually

Press release

1007. Internships, BSc/MSc/HiWi subjects

In a video, students give an overview of their work at IMMS

Career

1008. Internships, jobs, BSc/MSc subjects

Internships, jobs, BSc/MSc subjects: During your studies, you can get involved in ongoing research projects. Go to the limits of what is technically feasible and enter new ground together with us. We offer many practice-oriented topics as internships, bachelor and master theses.

Reference

1009. Investigation of detectors for optical pick-up systems for DVD applications

J. Klein, St. Lange session of the conference SENOR 2003, Mai 2003

Reference

1010. Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor

Davi Anders Brasil, Steffen Hesse Michael Katzschmann Ludwig Herzog Thomas Fröhlich Thomas Kissinger 20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan, October 23-26, 2024