Steffen Arnold, Physik Instrumente
”Our scientists have moved forward in the company of their IMMS colleagues into magnetic drive territory where there are prospects of hitherto unattainable accuracy of positioning, whether on a plane or in 6 dimensions.”
”IMMS has infused our development of a magnetic levitation direct drive with significant impetus. This is the type of technology which will have to be used in future for manufacture that involves accuracy down to the nanometre scale and absolute freedom from dust particles of any kind in the semiconductor, life science and biotech sectors. As the industrial partner of IMMS we are particularly delighted that the Institute’s work on the drive was nominated for Thüringen’s Innovation Prize in 2012. The new concepts applied – the new six-dimensioned maglev drive, the integrated 6D sensor and the highly accurate steering algorithm – will underpin future customised product development.
Our scientists have moved forward in the company of their IMMS colleagues into magnetic drive territory where there are prospects of hitherto unattainable accuracy of positioning, whether on a plane or in 6 dimensions. IMMS has such expertise in the field of magnetic drives that it is the ideal partner for our work on this development. We are looking forward greatly to continued shared successes in the field.”
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
Press release
IMMS für den Innovationspreis Thüringen 2012 nominiert
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.