Prof. Dr. Eberhard Manske, TU Ilmenau
”Due to its expertise in precision drive systems, IMMS makes a highly valuable contribution to our research. According to the DFG experts, ’In the field of nanopositioning and nanomeasuring technology, the world standard … is also set in Ilmenau.‘“
”The Collaborative Research Centre SFB 622, ’Nanopositioning and Nanomeasuring Machines‘, set up by the German Research Foundation (Deutsche Forschungsgemeinschaft, DFG) at the Ilmenau University of Technology, focuses on developing the scientific-technical foundations of design and implementation of highly precise nanopositioning and nanomeasuring machinery (NPM machines). They allow positioning, measuring, touch, modification and manipulation of three-dimensional objects with nanometre-precision.
Due to its expertise in precision drive systems, IMMS makes a highly valuable contribution to our research. Especially in the field of air-guided NMP systems, new solutions clearly exceed the capabilities of conventional systems by far. The results achieved by IMMS impressively prove the ability of the developed direct drive systems to position exactly ’down to the nanometre‘ and are an excellent starting point for their application in large driving areas. According to the DFG experts, ’In the field of nanopositioning and nanomeasuring technology, the world standard … is also set in Ilmenau.“
The reference is related to:
![[Translate to English:]](/fileadmin/_processed_/9/0/csm_20200731_IMG_2732_K4PNP-INPOS_SG_1920x1280_7c70c69f8a.jpg "[Translate to English:]")
Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Project
SFB622
The work of IMMS on novel high-precision drives contributes to nanopositioning systems acting over long distances of travel.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.