Publications

Presentation of research results at the ESSCIRC conference in Venice. Photograph: IMMS.

Scientific publications

Here you will find all IMMS publications since 1997: peer-reviewed conference papers / journal contributions, journal articles, talks and poster presentations.

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Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage

Davi Anders Brasil¹. Michael Katzschmann¹. Steffen Hesse¹. Ludwig Herzog¹. Thomas Kissinger². Thomas Fröhlich².

International Scientific Symposium on World Interferometry Day 2026, 20. April 2026, Ilmenau, Germany

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation NanoFab

Evaluation of triboelectric nanogenerators for low-frequency vibrations and their potential in wireless sensor networks

Marios Kaminiotis^1,2. Silvia Krug^3,4. Hannes Toepfer³. Romain Noël¹. Julien Le Scornec¹. Vincent Le Cam¹. Bastien Chapuis².

Smart Mater. Struct. 35 045009, DOI: doi.org/10.1088/1361-665X/ae513f

¹I4S, COSYS-SII, Inria, Université Gustave Eiffel, F-44344 Bouguenais, France. ²Université Paris-Saclay, CEA, LIST, F-91120 Palaiseau, France. ³IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ⁴Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 85170 Sundsvall, Sweden.

Reviewed scientific article

Very steep LED light pulses: a selection-guideline

Vincent Haude¹. Alexander Rolapp¹. Michael Meister¹.

2026 IEEE 23rd International Multi-Conference on Systems, Signals & Devices (SSD), March 30 – April 2, 2026, Catania, Italy

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Reviewed scientific article FluoResYst

Parameter extraction such as layer thickness and stress at wafer level for process monitoring in semiconductor manufacturing

Microstructure User Meeting 2026, Symposium on optical vibration measurement, March 19, 2026, Waldbronn, Germany

Talk and poster presentation

Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling

Ina Naujokat¹. Ludwig Herzog¹. Steffen Hesse¹. Parastoo Salimitari¹.

Applied Sciences 2026, 16, 2748. DOI: doi.org/10.3390/app16062748

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Reviewed scientific article VirtuSen

Evaluierung und Test der Empfangsleistung von Funksystemen

Björn Bieske¹. Michael Schenk².

38. ITG / GMM / GI -Workshop Testmethoden und Zuverlässigkeit von Schaltungen und Systemen (TuZ 2026), 22. - 24. Februar 2026, Potsdam, Germany

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Adolf Würth GmbH & Co. KG.

Smart distributed measurement and test systems Talk and poster presentation

Digitale Lösungen für den Obstbau: Assistenzsystem Obstverarbeitung – Digitaler Obstsorten-Zwilling

Lukas Oehm¹. Marco Götze².

Obstbautag Mecklenburg-Vorpommern 2026, 24. Februar 2026, Güstrow, Mecklenburg-Vorpommern, Germany

¹Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV, Dresden. ²IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Smart distributed measurement and test systems Talk and poster presentation MIRO

Real-Time Optimal Parameter Recommendation for Injection Molding Machines Using AI with Limited Dataset

Roy Bipasha¹. Silvia Krug^1,2. Tino Hutschenreuther¹.

AI 2026, 7, 49. doi.org/10.3390/ai7020049

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 85170 Sundsvall, Sweden.

Smart distributed measurement and test systems Reviewed scientific article ProQuaOpt

Case Study on Compression of Vibration Data for Distributed Wireless Condition Monitoring Systems.

Rick Pandey¹. Felix Grimm^2,3. Dominik Nille². Christoph Böckenhoff². Jonathan Gamez¹. Sebastian Uziel¹. Albert Dorneich². Tino Hutschenreuther¹. Silvia Krug^1,4.

Applied Sciences 2025, 15, 12346. DOI: doi.org/10.3390/app152212346

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Balluff GmbH, 73765 Neuhausen auf den Fildern, Germany. ³Institute of Smart Sensors (IIS), University of Stuttgart, 70569 Stuttgart, Germany. ⁴Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 851 70 Sundsvall, Sweden.

Integrated sensor systems Smart distributed measurement and test systems Reviewed scientific article HoLoDEC

Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions

Parastoo Salimitari¹. Steffen Hesse¹. Michael Katzschmann¹. Ludwig Herzog¹.

Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentation VirtuSen

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