Current Publication
Robust Adaptive Tracking Control for Highly Dynamic Nanoprecision Motion Systems
Alex S. Huaman1.
Johann Reger2.
in Engineering for a Changing World: Proceedings; 60th ISC, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, September 04-08, 2023, Ilmenau. DOI: doi.org/10.22032/dbt.58700
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
2Control Engineering Group, Technische Universität Ilmenau, 98693 Ilmenau, Germany.
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Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
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