IMMS - NPS6D200 – A Long Range Nanopositioning Stage with 6D Closed Loop Control

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NPS6D200 – A Long Range Nanopositioning Stage with 6D Closed Loop Control

Steffen Hesse¹. Alex Huaman¹. Michael Katzschmann¹. Bianca Leistritz¹. Ludwig Herzog¹.

Appl. Sci. 2024, 14, 6972. DOI: doi.org/10.3390/app14166972

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article

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IMMS developed actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.

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