IMMS - NPS6D200 – A Long Range Nanopositioning Stage with 6D Closed Loop Control

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NPS6D200 – A Long Range Nanopositioning Stage with 6D Closed Loop Control

Steffen Hesse¹, Alex S. Huaman¹, Michael Katzschmann¹, Bianca Leistritz¹, Ludwig Herzog¹

Applied Sciences 2024, 14(16), 6972, DOI: doi.org/10.3390/app14166972

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article

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K4PNP+Z

IMMS developed actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.

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