Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)

Jaqueline Stauffenberg¹. Ingo Ortlepp². Ulrike Blumröder². Denis Dontsov³. Christoph Schäffel⁴. Mathias Holz⁵. Ivo W. Rangelow⁶. Eberhard Manske².

tm - Technisches Messen. 2021, 88(9): 581-589. DOI: doi.org/10.1515/teme-2021-0079

¹Technische Universität Ilmenau, Institute for Process Measurement and Sensor Technology, Ilmenau, Germany. ²Technische Universität Ilmenau, Institute for Process Measurement and Sensor Technology, Ilmenau, Germany. ³SIOS Meßtechnik GmbH, Ilmenau, Germany. ⁴IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ⁵nano analytik GmbH, Ilmenau, Germany. ⁶Technische Universität Ilmenau, Nanoscale systems Group, Ilmenau, Germany.

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