Current Publication
Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)
Jaqueline Stauffenberg1, Ingo Ortlepp1, Ulrike Blumröder1, Denis Dontsov2, Christoph Schäffel3, Mathias Holz4, Ivo W. Rangelow5, Eberhard Manske1
in tm - Technisches Messen, vol. 88, no. 9, pp. 581-589, 2021, DOI: doi.org/10.1515/teme-2021-0079
1Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany, 2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, 3IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 4nano analytik GmbH, Ehrenbergstraße 3, 98693 Ilmenau, Thuringia, Germany, 5Technische Universität Ilmenau, Department of Mechanical Engineering, Institute of Process Measurement and Sensor Technology, Nanoscale Systems Group, 98684 Ilmenau, P.O. Box 10 05 65, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award