Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor

Current Publication

Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor

Davi Anders Brasil¹. Steffen Hesse¹. Michael Katzschmann¹. Ludwig Herzog¹. Thomas Fröhlich². Thomas Kissinger².

20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan, October 23-26, 2024

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article

Related content

Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.