Current Publication
Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor
Davi Anders Brasil1.
Steffen Hesse1.
Michael Katzschmann1.
Ludwig Herzog1.
Thomas Fröhlich2.
Thomas Kissinger2.
20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan, October 23-26, 2024
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.
2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Ilmenau, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for „Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems”
Alex Smith Huaman Loayza
Award