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Current Publication

Influence of temperature distribution on behavior, modeling, and reliability of BAW resonators

A. Tag1. R. Weigel1. A. Hagelauer1. B. Bader2. C. Huck2. M. Pitschi2. K. Wagner2. D. Karolewski3. C. Schäffel3.

Reliability Physics Symposium, 2014 IEEE International , Pages 5C.5.1 - 5C.5.7, DOI: dx.doi.org/10.1109/IRPS.2014.6860669

1Institute for Electronics Engineering University of Erlangen-Nuremberg. 2TDK Corporation. 3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH.

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Project

MUSIK

IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.

Award

Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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