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Current Publication

Development of an Integrated Guiding and Actuation Element for High Dynamic Nanopositioning Systems

Stephan Gorges1. Bianca Leistritz1. Steffen Hesse1. I. Ortlepp2. G. Slotta3. Christoph Schäffel1.

Ilmenau Scientific Colloquium 2017, Session 1.1 – Precision Measurement Technology, 11-15 September 2017, Ilmenau

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Institut für Prozessmess- und Sensortechnik, TU Ilmenau. 3AeroLas GmbH.

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