Development of an Integrated Guiding and Actuation Element for High Dynamic Nanopositioning Systems

Current Publication

Development of an Integrated Guiding and Actuation Element for High Dynamic Nanopositioning Systems

Stephan Gorges¹. Bianca Leistritz¹. Steffen Hesse¹. I. Ortlepp². G. Slotta³. Christoph Schäffel¹.

Ilmenau Scientific Colloquium 2017, Session 1.1 – Precision Measurement Technology, 11-15 September 2017, Ilmenau

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ²Institut für Prozessmess- und Sensortechnik, TU Ilmenau. ³AeroLas GmbH.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

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INPOS

Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces

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IMMS has developed a vertical drive to raise and lower objects through 10 mm under active control with nanometre precision.