Current Publication
A Large-Travel Hybrid Metrology Platform Integrating Laser Focus Sensor and Atomic Force Microscopy
Davi Anders Brasil1, Michael Katzschmann1, Steffen Hesse1, Ludwig Herzog1, Thomas Fröhlich2, Thomas Kissinger2
in tm - Technisches Messen, vol. 93, no. s1, pp. 34-39, 2026, DOI: doi.org/10.1515/teme-2026-0055
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany
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Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award