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Projects

Here you will find all the projects that we present on the website and include in various places. Simply filter according to your interests.

86 results

Project

PRIMOS

IMMS made contributions that allow vibrating quartzes in microprocessors to be substituted with MEMS resonators.

Project

PMS380

Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide.

Project

Ovutinin

For an innovative rapid test for fertility diagnostics, IMMS is developing an image sensor for time-resolved fluorescence measurement.

Project

NFM-100

For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Project

MUSIK

IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.

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