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Project
PRIMOS
IMMS made contributions that allow vibrating quartzes in microprocessors to be substituted with MEMS resonators.
Project
PMS380
Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide.
Project
Ovutinin
For an innovative rapid test for fertility diagnostics, IMMS is developing an image sensor for time-resolved fluorescence measurement.
Project
OptoMed vacuum air bearings
Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.
Project
NFM-100
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.