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Patent DE 10 2008 050 540

Arrangement for processing an analogue sensor output signal of at least one optical sensor

Arrangement for processing an analogue sensor output signal (Sa) of at least one optical sensor (1), for position determination, in the form of a position determination unit (1a) combining the optical sensor and components for determining the position, with at least one optical sensor and an interpolator module (2) connected to the optical sensor and arranged directly behind the sensor and combining the components for determining the position from the sensor signal, characterised in that the interpolator module contains an AD converter unit (3) for generating a digitised sensor signal (SD) and a programmable signal processing unit (4) for calculating an interpolated position value (P), that the interpolator module contains an AD converter unit (3) for generating a digitised sensor signal (SD) and a programmable signal processing unit (4) for calculating an interpolated position value (P), wherein the signal processing unit (4) is designed as a programmable hardware, wherein the programmable hardware has a hardware-implemented program code for a tracking unit (8) for carrying out an interpolating position determination, wherein the hardware-implemented program code is designed for a tracking algorithm for a control loop support distance compensation calculation.

Patent No.:DE 10 2008 050 540

Inventor:Sebastian Uziel

Application:

Angle or length measuring devices for position determination in drive technology (e.g. linear motors| planar motors)

Research field:Magnetic 6D-direct drives with nanometre precision

granted patent

Application date:06 Oktober 2008

Date of first publication:29 April 2010

Date of publication of grant:06 August 2015


Contact

Contact

Dr.-Ing. Ludwig Herzog

Head of Mechatronics

ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60

Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.


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Research field

Magnetic 6D direct drives with nm precision

To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.

High-precision drive systems with spatial (6D) positioning accuracies in the single-digit nm range.

Lead application

nm measurement and structuring of objects

To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.

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