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754.
Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding
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755.
Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding
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756.
Investigations on Wafer-Level Testing for Accelerometers by Harmonic Response Measurements
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757.
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)