Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.
Eiraj Saqib,
Isaac Sánchez Leal
Irida Shallari
Axel Jantsch
Silvia Krug
Mattias O'Nils
2023 IEEE Sensors Applications Symposium (SAS), 18-20 July 2023, Ottawa, ON, Canada, July 18-20, 2023, pp. 1-6, DOI: https://doi.org/10.1109/SAS58821.2023.10254054.
Björn Bieske,
Dagmar Kirsten
Michael Frey
Andreas Ott
2025 IEEE 22nd International Multi-Conference on Systems, Signals & Devices (SSD), Monastir, Tunisia, 2025, pp. 1315-1321, DOI: https://doi.org/10.1109/SSD64182.2025.10989885
B. Dimov,
V. Boos
T. Reich
C. Lang
E. Hennig
R. Sommer
Xth International Workshop on Symbolic and Numerical Methods, Modeling and Applications to Circuit Design (SM²ACD'08), pp 44-48, 07.-08. Oktober, Erfurt, 2008
B. Dimov,
V. Boos
T. Reich
C. Lang
E. Hennig
R. Sommer
Xth International Workshop on Symbolic and Numerical Methods, Modeling and Applications to Circuit Design (SM²ACD'08), 7.-8. Oktober 2008, Erfurt, Germany