Steffen Hesse,
Michael Katzschmann
Alex S. Huaman
Stephan Gorges
Eberhard Manske
euspen – Special Interest Group Meeting: Precision Motion Systems & Control, 15th – 16th November 2022, s-Hertogenbosch, The Netherlands, NL
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
The IMMS is developing a CMOS image sensor for time-resolved fluorescence detection for direct integration into microfluidic cartridges using 3D screen printing.
”IMMS was able to offer us valuable support due to its many years of experience in the field of measurement technology and circuit design for optical sensors. The reliable work and the trusting partnership is a highly valued basis for the cooperation with IMMS.”
”Their experience in digital IC design, synthesis, place and route, verification and sign-off using the state-of-the art tools and methods makes IMMS a great partner to work with when developing mixed-signal integrated sensors.”
