Steffen Hesse,
Michael Katzschmann
Alex S. Huaman
Stephan Gorges
Eberhard Manske
euspen – Special Interest Group Meeting: Precision Motion Systems & Control, 15th – 16th November 2022, s-Hertogenbosch, The Netherlands, NL
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
The IMMS is developing a CMOS image sensor for time-resolved fluorescence detection for direct integration into microfluidic cartridges using 3D screen printing.
