Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.
Oscar Artur Bernd Berg,
Eiraj Saqib
Axel Jantsch
Irida Shallari
Silvia Krug
Isaac Sánchez Leal
Mattias O’Nils
in IEEE Access, vol. 13, pp. 103640-103648, 2025, DOI: https://doi.org/10.1109/ACCESS.2025.3579107