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T. Reich
C. Lang
E. Hennig
R. Sommer
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2025 IEEE 22nd International Multi-Conference on Systems, Signals & Devices (SSD), Monastir, Tunisia, 2025, pp. 1315-1321, DOI: https://doi.org/10.1109/SSD64182.2025.10989885
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2023 IEEE Sensors Applications Symposium (SAS), 18-20 July 2023, Ottawa, ON, Canada, July 18-20, 2023, pp. 1-6, DOI: https://doi.org/10.1109/SAS58821.2023.10254054.
Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.