Georg Gläser,
Benjamin Saft
Dominik Wrana
Arthanasios Gatzastras
Eckhard Hennig
2018 Forum on Specification & Design Languages (FDL), Garching, 10-12 September 2018, pp. 5-16.
DOI: https://doi.org/10.1109/FDL.2018.8524131
Stephan Gorges,
Steffen Hesse
33rd Annual Meeting of the American Society for Precision Engineering (ASPE), 2018, 4-9 November 2018, Las Vegas, Nevada, USA
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
Sebastian Uziel,
Benjamin Eichhorn
Michael Katzschmann
Thomas Elste
Maximilian Matthe
Philipp Schulz
9. Jahreskolloquium Kommunikation in der Automation (KommA 2018), 21. November 2018, Lemgo
Bianca Leistritz,
Wolfram Kattanek
18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2018, 4-7 December, 2018, Daytona Beach, Florida, USA