Falk Eisenreich,
Marco Götze
Silvia Krug
Tino Hutschenreuther
Kathrin Veigel
in elektroniknet.de, 22. August 2024, https://www.elektroniknet.de/smarter-world/energieautarkes-system-behaelt-feinstaub-permanent-im-blick.219767.html
Lead application nm measurement and structuring of objects: To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Research field Magnetic 6D-direct drives with nanometre precision: To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
