1731 results
Reference
1235.
Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup
Reference
1236.
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
Reference
1237.
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS