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  1238. Interferometrically controlled, scalable x-y planar positioning stage concept  
Ilko Rahneberg, Enrico Langlotz, Denis Dontsov, Steffen Hesse, Jaqueline Stauffenberg, Eberhard Manske, Virtual 2021 Special Interest Group Meeting: Micro/Nano Manufacturing  
Press release
  1239. International conferences on methods for the design of integrated circuits  
Young scientists from electrical engineering visit Erfurt virtually  
Press release
  1240. Internships, BSc/MSc/HiWi subjects  
In a video, students give an overview of their work at IMMS  
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