K. Gastinger,
M. Kujawinska
U. Zeitner
C. Gorecki
Dr. Ch. Schäffel
S. Beer
R. Moosburger
M. Pizzi
Photonics Europe 2010, 12.04-16.04.2010, Brüssel, Belgien
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
,
Jun Tan
Muralikrishna Sathyamurthy
Alexander Rolapp
Jonathan Gamez
Moataz Elkharashi
Benjamin Saft
Sylvo Jäger
Ralf Sommer
in IEEE Journal of Radio Frequency Identification, vol. 4, no. 1, pp. 3-13, March 2020, DOI: https://doi.org/10.1109/JRFID.2020.2967862
Lead application nm measurement and structuring of objects: To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
