Peter Chall, ALSI
”The achieved extreme precision, reproducibility and productivity of the laser dicing technology are at the forefront of international excellence. The close cooperation with IMMS leads to innovative developments, which is a basis that we can count on to expand our position as a leading technology provider.“
”As a result of competent and creative collaboration, at the end of 2009, the company ALSI was able to take the first prototype of its new 12 inch laser dicing platform into operation. The achieved extreme precision, reproducibility and productivity of the laser dicing technology are at the forefront of international excellence.
This is significantly boosted by the planar drive system developed by IMMS. The close cooperation with IMMS leads to innovative developments, which is a basis that we can count on to expand our position as a leading technology provider.“
The reference is related to:
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Project
PMS380
Thanks to the planar drive system developed by IMMS microelectronic chips are separated from 12” wafers in semiconductor production worldwide.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.