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Current Publication

Tip‑ and Laser‑based 3D Nanofabrication in Extended Macroscopic Working Areas

Ingo Ortlepp1. Thomas Fröhlich1. Roland Füßl et al.1.

Nanomanufacturing and Metrology 4, 132–148 (2021). DOI: doi.org/10.1007/s41871-021-00110-w

1Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Ehrenbergstrasse 29, 98693, Ilmenau, Germany.